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| 2 |
Characteristics of Sn doping on Ga2O3 thin films by PEALD using Si-based substrate (2024)
"Characteristics of Sn doping on Ga2O3 thin films by PEALD using Si-based substrate"
Hayoung Park1, Suwan Lee1, Jisu Kim1, Hyungtak Seo1,2,*
GCIM 2024, 오프라인 개최, 06월 10일 [Poster]
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| 1 |
High-performance Indium Oxide by Atomic Layer Deposition on Compatible Toward BEOL (2024)
"High-performance Indium Oxide by Atomic Layer Deposition on Compatible Toward BEOL"
Suwan Lee1, Hayoung Park1, Hyunmin Dang1, Hyungtak Seo1,2,*
GCIM 2024, 오프라인 개최, 06월 10일 [Poster]
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